Crystalline material acceleration sensor

摘要

The acceleration sensor has a band-shaped seismic mass (10) suspended to allow its movement in the longitudinal direction in response to the applied acceleration. Parallel capacitor plates (13) extending transverse to the longitudinal direction cooperate with further capacitor plates (14) secured to a base (16), to provide a capacitor with a capacitance value that varies with the position of the seismic mass. Parts of the sensor are made of a monocrystalline material and other parts are made of a polycrystalline material. Pref. the seismic mass is made of polycrystalline silicon and the suspension mountings and the parallel capacitor plates are made of monocrystalline silicon.