Verfahren zur aufeinanderfolgenden Belichtung kleiner Abschnitte eines Halbleiterwafers,申请号DE19853510478-传众专利搜索

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发明名称	Verfahren zur aufeinanderfolgenden Belichtung kleiner Abschnitte eines Halbleiterwafers
摘要
申请公布号	DE3510478(C2)	申请公布日期	1995.02.02
申请号	DE19853510478	申请日期	1985.03.22
申请人	USHIO DENKI K.K., TOKIO/TOKYO, JP	发明人	KIRA, TAKEHIRO, KOBE, HYOGO, JP
分类号	G03F7/20;(IPC1-7):G03F7/22;G03B27/16;G03B27/72	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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