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发明名称
摘要
申请公布号
JPH079904(B2)
申请公布日期
1995.02.01
申请号
JP19860214228
申请日期
1986.09.12
申请人
发明人
分类号
H01L21/28;H01L21/285;H01L21/3205;H01L21/3213;H01L21/336;H01L21/768;H01L21/8234;H01L23/52;H01L27/088;H01L29/78;(IPC1-7):H01L21/320;H01L21/823
主分类号
H01L21/28
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代理人
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地址
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