| 摘要 |
PURPOSE:To provide a picture detector capable of accurately detecting only data corresponding to a pattern isolated on a sample. CONSTITUTION:Picture data from a CCD sensor 2 are ternarized in a ternary circuit 5 and two-dimensional judgement picture data are prepared on the memories of window segmenting circuits 6 and 7. (n)X(n) picture elements inside the judgement picture data are segmented in a first window segmenting circuit 6, (m)X(m) picture elements {(m)>(n)} whose center coincides with a first window are segmented in a second window segmenting circuit 7 and picture element numbers for the respective gradations are counted by counter circuits 8 and 9. The counted value of the counter circuit 8 is subtracted from the counted value of the counter circuit 9 in a subtracting circuit 10 and whether or not the data corresponding to the pattern isolated on the sample are present inside the picture elements segmented by the first window segmenting circuit 6 is judged based on a subtracted value in the subtracting circuit 10 and the counted value of the counter circuit 8 by a judgement logic circuit 11. |
