PREPROCESSING METHOD FOR SEMICONDUCTOR WAFER BEFORE OXIDIZATION,申请号JP19930117476-传众专利搜索

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发明名称	PREPROCESSING METHOD FOR SEMICONDUCTOR WAFER BEFORE OXIDIZATION
摘要
申请公布号	JPH06333917(A)	申请公布日期	1994.12.02
申请号	JP19930117476	申请日期	1993.05.20
申请人	FUJITSU LTD	发明人	OKUNO MASAKI
分类号	C23C14/10;H01L21/26;H01L21/316;(IPC1-7):H01L21/316	主分类号	C23C14/10
代理机构		代理人
主权项
地址

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