| 摘要 |
PURPOSE:To prevent the fluctuation of the resonance frequency and also to improve the yield of piezo-electric elements by attaching a resist metal onto the vibrating electrode of a piezo-electric element and controlling the thickness of the resist metal. CONSTITUTION:The electrodes 2 of silver, etc., are formed by vapor deposition on both main surface sides of a piezo-electric substrate 1, and the support electrodes 2b formed at both ends of the substrate 1 are masked by the mask patterns. Then the resist metals 13 are formed on the electrodes 2 formed on both sides of the substrate 1 by a sputtering process, the vapor deposition, etc. Then the mask patterns are removed. The etching resist ink 12 is applied on the metals 13 and the electrodes 2b in the directions opposite to each other on each surface covering the support part 1c of both ends of the substrate 1 from a point near the center part and counter to each other at a point near the center part of the substrate 1 respectively. In such a constitution, the exposed electrodes 2 and the metals 13 are etched and eliminated. Thus a vibrating part 1a is formed at a point near the center part of the substrate 1, and the vibration leaking parts 1b are formed between the part 1a and the parts 1c respectively. Then the ink 12 is removed by a solvent. In such a way, it is possible to obtain piezoelectric element 24 containing the metals 13 formed on the vibrating electrodes 2a. |
