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发明名称
HIGH FREQUENCY DEVICE
摘要
申请公布号
JPH06326543(A)
申请公布日期
1994.11.25
申请号
JP19930110252
申请日期
1993.05.12
申请人
JEOL LTD
发明人
HIDAKA SHINTARO
分类号
C23C14/34;C23C14/40;C23F4/00;H01L21/302;H01L21/3065;H03H7/40;(IPC1-7):H03H7/40
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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