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发明名称
ECR PLASMA TREATING DEVICE
摘要
申请公布号
JPH06256954(A)
申请公布日期
1994.09.13
申请号
JP19930041008
申请日期
1993.03.02
申请人
JAPAN STEEL WORKS LTD:THE
发明人
SAWAI YOSHIKI;KANEDA YASUMASA;SHIKAUCHI TOKUYUKI
分类号
C23C16/50;C23C16/511;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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