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发明名称
INSULATED CLEAN COMPARTMENT FOR FLEXIBLE PROCESSING SYSTEM
摘要
申请公布号
RU2017525(C1)
申请公布日期
1994.08.15
申请号
SU19925035229
申请日期
1992.03.31
申请人
GRIGOREV VALERIJ VASILEVICH
发明人
ARZAMASTSEVA LYUBOV V;AFANASEV STANISLAV S;GRIGOREV VALERIJ V;ZHEMCHUGOV VLADISLAV E
分类号
B01L1/04;A61L9/00;F24F5/00;(IPC1-7):B01L1/04
主分类号
B01L1/04
代理机构
代理人
主权项
地址
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