| 摘要 |
PURPOSE:To make it possible to perform the analysis such as the secure extraction or the like of the characteristics, positions and the like of the abnormal part of a surface by shifting a specified region at a moving pitch higher than a measuring pitch, and performing the waveform analysis approximately continuously for the entire region. CONSTITUTION:The starting point of a certain window is made to be (n). The region from this point to a region to (n+w) obtained by adding a window width (w) is made to be the window N. In the waveform analysis, computation is performed in the window N. In the shift (a), the starting point of the window is deviated, and the window N is moved by the shifting amount (s) from the starting point Therefore, the value (n+s), which is obtained by adding the shift amount (s) to the starting point (n) of the window N before the shifting, becomes the starting point of a new window N+1. Computer processing is performed in the newly formed window N+1. Thereafter, this operation is repeated until the time point, where the end point of the window does not exceeds the irregular-shaped data. The window is moved in this procedure, and the waveform analysis effective for flaw detection is expanded to the entire profile. |
