| 摘要 |
PURPOSE:To realize a novel method for inspecting a surface which can effectively and easily detect an abnormal position of a surface to be inspected by removing influence of halation of an inspecting unit with an illumination light source. CONSTITUTION:A method for inspecting a surface at abnormal positions A, B, C of a part 0A to be inspected having the steps of illuminating the part 0A of a surface 0 to be inspected, reading an image of the illuminated part by a reader 20 to convert it into a signal, processing the signal with a threshold value to detect the abnormal positions A, B, C, comprises the steps of sequentially illuminating the unit from two or more different directions, reading the image of the illuminated part at each illuminating time, converting it into a signal with the threshold value, and calculating an AND operation of image data of each illumination processed with the threshold value to detect the abnormal positions. |
