DETECTION OF DEFECT IN INSULATING FILM,申请号JP19920178050-传众专利搜索

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发明名称	DETECTION OF DEFECT IN INSULATING FILM
摘要
申请公布号	JPH0621181(A)	申请公布日期	1994.01.28
申请号	JP19920178050	申请日期	1992.07.06
申请人	MATSUSHITA ELECTRON CORP	发明人	YAMASHITA HIROSHI
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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