| 摘要 |
PURPOSE:To provide a laser beam machine wide in machining area to a work, high in machining accuracy and long in pattern life in the laser beam machine to abrade a plastic film etc. CONSTITUTION:The laser beam outputted by a laser beam generator 1 is scanned on the mask surface 7 by a scanner part 2 to perform two-dimensional scanning through axes U, V and the laser beam permeating the mask 7 forms an image on the work 14 on a machining table 15 through optical systems 9, 19. The machining table 15 is controlled by an X-axis movable table 16, a Y-axis movable table 17 and a theta-axis movable table 18. |
