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发明名称
Silicon transducer
摘要
申请公布号
AU3548193(A)
申请公布日期
1993.10.07
申请号
AU19930035481
申请日期
1993.03.25
申请人
AWA MICROELECTRONICS PTY LIMITED
发明人
WITOLD WISZNIEWSKI
分类号
H01L21/302;H01L21/306;H01L29/00;H01L31/02;(IPC1-7):H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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