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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0547690(A)
申请公布日期
1993.02.26
申请号
JP19910231140
申请日期
1991.08.20
申请人
NIKKO KYODO CO LTD
发明人
MORI MASAYUKI
分类号
C30B31/14;H01L21/22
主分类号
C30B31/14
代理机构
代理人
主权项
地址
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