发明名称 BUMP FORMING METHOD FOR SEMICONDUCTOR ELEMENT
摘要 PURPOSE:To obtain recesses and protrusions uniformly on the bump section of a semiconductor element for a face-down mounting. CONSTITUTION:A mold 12, to be used for a bump formation, is manufactured by forming recesses and protrusions in uniform depth on a plate material 10a to be used for a mold, and on the other hand, after formation of flat bumps 14 on the electrode part of a semiconductor element 1, the bump part 14 of the semiconductor element 13 is stamped on the recess and protrusion part 11 of the mold 12 to be used for a bump, and grooves 15, having recesses and protrusions in uniform depth, is formed.
申请公布号 JPH0513419(A) 申请公布日期 1993.01.22
申请号 JP19910162898 申请日期 1991.07.03
申请人 ROHM CO LTD 发明人 TANAKA AKIHIRO
分类号 H01L21/60;H01L21/321 主分类号 H01L21/60
代理机构 代理人
主权项
地址