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发明名称
SCANNING ELECTRON MICROSCOPE
摘要
申请公布号
JPH04269437(A)
申请公布日期
1992.09.25
申请号
JP19910050614
申请日期
1991.02.22
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
HONMA YOSHIKAZU;TOMITA MASAHITO;HAYASHI TAKAYOSHI
分类号
H01J37/05;H01J37/244;H01J37/28
主分类号
H01J37/05
代理机构
代理人
主权项
地址
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