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发明名称
CLEANING APPARATUS
摘要
申请公布号
JPH04130724(A)
申请公布日期
1992.05.01
申请号
JP19900250265
申请日期
1990.09.21
申请人
HITACHI LTD;HITACHI ELECTRON ENG CO LTD
发明人
KAMIYAMA KAZUMI;TAKEHANA YOICHI
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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