发明名称 LIGHT SOURCE APPARATUS
摘要 PURPOSE:To reduce a size of an apparatus and simplify adjustment at the time of assembly by providing photoelectric conversion elements having an incident surface divided into a plurality of segments, and a means for comparing electric signals from the respective segments. CONSTITUTION:Arcs of a lamp pass from holes 2a,2b of an elliptic converging mirror 2 via pin hole boards 17a,17b through image forming lenses 18a,18b, are reflected on return mirrors 19a,19b and are incident to photoelectric conversion elements 20a,20b to be projected. Then after they are converted into electric signals in the photoelectric conversion elements 20a,20b, they are converted into voltages in a signal processor 21 and display with respect to positions of the arcs is done by a display means 22. With this constitution it is not necessary to place a light receiver of an illuminance monitor directly on a radiating surface as well as the number of lenses and mirrors can be reduced and length of a light passage can be shortened. Therefore an apparatus can be reduced in size and assembly of a monitor mechanism of the arc is simplified.
申请公布号 JPH03115828(A) 申请公布日期 1991.05.16
申请号 JP19890251743 申请日期 1989.09.29
申请人 USHIO INC 发明人 MIURA TAKANOBU;INOMATA YOSHIHARU;MOTOMATSU YOSHIHIRO
分类号 B41J2/465;G01M11/00;G02B27/62;G03F7/20;H01L21/027;H01L21/30 主分类号 B41J2/465
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