| 发明名称 |
Method using x-rays to determine thickness of organic films |
| 摘要 |
A thickness determination method for organic films comprises the steps of: irradiating an organic film to be measured with x-rays at a certain angle of incidence, finding an angle of reflection at which the x-ray intensity reaches a peak, and finding the thickness of the film from the angle of this peak.
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| 申请公布号 |
US5003569(A) |
申请公布日期 |
1991.03.26 |
| 申请号 |
US19900493322 |
申请日期 |
1990.03.14 |
| 申请人 |
AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY;MINISTRY OF INTERNATIONAL TRADE & INDUSTRY |
发明人 |
OKADA, SHUJI;MATSUDA, HIRO;NAKANISHI, HACHIRO;KATO, MASAO |
| 分类号 |
G01B15/02 |
主分类号 |
G01B15/02 |
| 代理机构 |
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