发明名称 Illuminating optical device
摘要 An illuminating optical device of the type in which light from a light source is made incident on a condenser lens through a fly-eye lens a light transmitting object to be illuminated is disposed between the condenser lens and a projection optical system. The degree of surface finish of the emergence surface of the fly-eye lens is made lower than that of the incident surface.
申请公布号 US4998191(A) 申请公布日期 1991.03.05
申请号 US19890427379 申请日期 1989.10.27
申请人 ASAHI KOGAKU KOGYO KABUSHIKI KAISHA 发明人 TEJIMA, YASUYUKI;OGAWA, RYOTA
分类号 G03B21/14;G02B3/00;G02B19/00;G03B27/54;G03F7/20;H01L21/027;H01L21/30 主分类号 G03B21/14
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