发明名称 |
Illuminating optical device |
摘要 |
An illuminating optical device of the type in which light from a light source is made incident on a condenser lens through a fly-eye lens a light transmitting object to be illuminated is disposed between the condenser lens and a projection optical system. The degree of surface finish of the emergence surface of the fly-eye lens is made lower than that of the incident surface.
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申请公布号 |
US4998191(A) |
申请公布日期 |
1991.03.05 |
申请号 |
US19890427379 |
申请日期 |
1989.10.27 |
申请人 |
ASAHI KOGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
TEJIMA, YASUYUKI;OGAWA, RYOTA |
分类号 |
G03B21/14;G02B3/00;G02B19/00;G03B27/54;G03F7/20;H01L21/027;H01L21/30 |
主分类号 |
G03B21/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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