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发明名称
METHOD AND DEVICE FOR REMOVING PROCESS OF THIN COPPER FILM WITH EXCIMER LASER
摘要
申请公布号
JPH0336783(A)
申请公布日期
1991.02.18
申请号
JP19890172646
申请日期
1989.07.04
申请人
RIKAGAKU KENKYUSHO
发明人
TOYODA KOICHI
分类号
C23F4/04;H01L21/302;H05K3/08
主分类号
C23F4/04
代理机构
代理人
主权项
地址
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