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发明名称
DRY ETCHING
摘要
申请公布号
JPH02240924(A)
申请公布日期
1990.09.25
申请号
JP19890060688
申请日期
1989.03.15
申请人
OKI ELECTRIC IND CO LTD
发明人
KOBAYASHI MOTOKI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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