DRY ETCHING METHOD,申请号JP19880216051-传众专利搜索

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发明名称	DRY ETCHING METHOD
摘要
申请公布号	JPH0265133(A)	申请公布日期	1990.03.05
申请号	JP19880216051	申请日期	1988.08.30
申请人	SONY CORP	发明人	KADOMURA SHINGO
分类号	H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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