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发明名称
APPARATUS FOR VACUUM VAPOR GROWTH
摘要
申请公布号
JPH0255293(A)
申请公布日期
1990.02.23
申请号
JP19880205487
申请日期
1988.08.18
申请人
NEC CORP
发明人
SAEKI TAKANORI
分类号
C30B25/14;H01L21/205
主分类号
C30B25/14
代理机构
代理人
主权项
地址
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