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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPH0225022(A)
申请公布日期
1990.01.26
申请号
JP19880175600
申请日期
1988.07.13
申请人
HITACHI LTD
发明人
UDA HIDE;OWADA NOBUO
分类号
H01L29/73;H01L21/28;H01L21/331;H01L29/72;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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