METHOD AND APPARATUS FOR OXIDIZING SEMICONDUCTOR DEVICE,申请号JP19880158656-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR OXIDIZING SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH027524(A)	申请公布日期	1990.01.11
申请号	JP19880158656	申请日期	1988.06.27
申请人	FUJITSU LTD	发明人	TAKAOKA MATSUO
分类号	H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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