Method for producing thin film patterns on substrates.

摘要

A conductive pattern is formed, by laser scribing, on a soda-lime glass substrate suitable for liquid crystal devices. Portions of an ITO film formed on the glass substrate are removed by projection of laser pulses. An excimer laser is employed to emit the laser beam pulses. The laser projection is effected so as not to eliminate an ion blocking film intervening between the ITO film and the glass substrate and made of non-doped silicon oxide which prevent alkali ions from escaping from the glass substrate.