| 摘要 |
<p>PROBLEM TO BE SOLVED: To reduce undesirable influence of a sample charge depending on the scan direction, so that the intrinsic shape of a sample can be faithfully displayed. SOLUTION: A scanning pattern is selected in accordance with the symmetry of a sample, and image treating of overlapping, averaging, etc., is applied to an image by a plurality of the scanning patterns, so as to form a sample image. For a sample having a lateral symmetric pattern, a horizontal direction (X) serves as a main direction and a vertical direction (Y) serves as a subdirection, a raster scan 41 with the main direction scan as the right direction and a raster scan 42 with the main direction scan as the left direction are combined. In the case that the sample pattern is rotationally symmetric, a helical pattern diverging to a peripheral part from the observation region center or a helical pattern converging toward the center from the observation region peripheral is used, and these helical patterns are combined to be used.</p> |
