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发明名称
MEASURING APPARATUS FOR LENGTH BY ELECTRON BEAM
摘要
申请公布号
JPS6463807(A)
申请公布日期
1989.03.09
申请号
JP19870220137
申请日期
1987.09.04
申请人
HITACHI LTD
发明人
MATSUOKA GENYA
分类号
G01B15/00;H01J37/28;H01J37/30
主分类号
G01B15/00
代理机构
代理人
主权项
地址
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