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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPS6453551(A)
申请公布日期
1989.03.01
申请号
JP19870212182
申请日期
1987.08.25
申请人
SUMITOMO METAL IND LTD
发明人
INUDOU YASUHIRO;EHATA TOSHIKI;TAWARA AKIHIRO
分类号
H01L21/31;H01L21/318
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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