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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6413719(A)
申请公布日期
1989.01.18
申请号
JP19870168846
申请日期
1987.07.08
申请人
CANON INC
发明人
SEKIGUCHI YOSHINOBU
分类号
C30B23/08;C30B29/40;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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