发明名称 |
TURBO-MOLECULAR PUMPS |
摘要 |
A turbo-molecular pump has stator discs 2 separated from one another by spacer rings 3 constructed in such a manner that gases streaming back can re-enter the suction space 8 through reduced portions 5 at the outer diameter and through radial recesses 6. Inner reduced portions 7 serve for the additional location of the stator discs 2. |
申请公布号 |
GB2206648(A) |
申请公布日期 |
1989.01.11 |
申请号 |
GB19880015851 |
申请日期 |
1988.07.04 |
申请人 |
* ARTHUR PFEIFFER VAKUUMTECHNIK WETZLAR GMBH |
发明人 |
KURT * HOLSS;HEINRICH * LOTZ |
分类号 |
F04D19/04;(IPC1-7):F04D19/04 |
主分类号 |
F04D19/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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