发明名称 ELECTRON IMPACT TYPE ION SOURCE
摘要 PURPOSE:To increase the thermoelectron current density and increase the density of generated ions by forming a thermoelectron generating source into a wave shape and arranging it in parallel with a grid. CONSTITUTION:A thermoelectron generating source 10 is arranged in parallel with the axis of a cylindrical grid 2, generated ions are collected by an ion collector 3 arranged on the axis of the grid 2. Almost the same distance is kept between the thermoelectron generating source 10 and the grid 2 at all positions of the thermoelectron generating source 10, the effective area generating thermoelectrons is increased, and the thermoelectron current density is increased. The density of ionized gas atoms is thereby increased.
申请公布号 JPS63284738(A) 申请公布日期 1988.11.22
申请号 JP19870119401 申请日期 1987.05.15
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 NISHIHARA SATOSHI
分类号 H01J27/20 主分类号 H01J27/20
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