摘要 |
PURPOSE:To increase the thermoelectron current density and increase the density of generated ions by forming a thermoelectron generating source into a wave shape and arranging it in parallel with a grid. CONSTITUTION:A thermoelectron generating source 10 is arranged in parallel with the axis of a cylindrical grid 2, generated ions are collected by an ion collector 3 arranged on the axis of the grid 2. Almost the same distance is kept between the thermoelectron generating source 10 and the grid 2 at all positions of the thermoelectron generating source 10, the effective area generating thermoelectrons is increased, and the thermoelectron current density is increased. The density of ionized gas atoms is thereby increased.
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