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发明名称
摘要
申请公布号
JPS6337496(B2)
申请公布日期
1988.07.26
申请号
JP19790039934
申请日期
1979.04.03
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
SEKIBA TOSHINOBU
分类号
H01L21/52;H01L21/58;H01L23/14;H01L23/367
主分类号
H01L21/52
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代理人
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