| 摘要 |
<p>PURPOSE:To promote the use of a device in a vacuum preventing high accuracy of rotation and high durability from being lost, by equipping the device with a gas bearing supporting a rotary shaft, driving means rotating the rotary shaft, means contactlessly sealing outflow gas from the gas bearing, and so on. CONSTITUTION:Gas, supplied from a gas supply device 24, is jetted to a fine clearance between bearings 7 and a rotor 2 and between bearings 8a, 8b and thrust receivers 3, 4, supporting a shaft 1. And outflow gas to a casing B and to a gas discharge part 18 from exhaust ports 26, 10a is discharged to the outside of a chamber C. Further a suction pump 31 performs exhaust of a fluid attracting groove 19. Here a motor 9, which rotates the shaft 1, provides a stator 11 contactlessly with a rotor 12 further with a gas seal 13 in no contact with the shaft 1, accordingly a gas bearing 5 is prevented from deteriorating its rotating accuracy even in a vacuum, and rotary driving of high accuracy can be performed.</p> |
