| 摘要 |
PURPOSE:To lenghten a pulse width by forming an electrically equivalent circuit inside a laser tube in such a way that the circuit can flow a reciprocating electric current between main discharge electrodes through a peaking capacitor or the like. CONSTITUTION:A gas laser medium is sealed in a laser tube 10 at a pressure of more than the stmospheric pressure; main discharge electrodes 11a, 11b which are located face to face with each other to constitute a pair are installed there; pin electrodes 14, 15 are connected to the respective main discharge electrodes 11a, 11b via inductances La, Lb for resonance use and peaking capacitors 12, 13 for shaping the waveform of an electric current. If the inductances La, Lb for resonance use are connected to the peaking capacitors 12, 13 so that an electrically equivalent circuit inside the laser tube 10 can satisfy the oscillating conduction, a reciprocating electric current flows between the main discharge electrodes 11a, 11b, and a pulsed laser beam is output twice in succession. As a result, it is possible to output a pulsed laser beam of a long pulse-width so that a laser-induced chemical reaction or the like during the production process of a semiconductor device can proceed continuously and smoothly. |
