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发明名称
METHOD OF ETCHING SILICON
摘要
申请公布号
JPS632328(A)
申请公布日期
1988.01.07
申请号
JP19870093430
申请日期
1987.04.17
申请人
INTERNATL BUSINESS MACH CORP <IBM>
发明人
NIKORASU BIICHIKO
分类号
H01L21/302;H01L21/306;H01L21/3065;H01L21/308
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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