发明名称 |
Method for generating thin films by means of cluster deposition |
摘要 |
To avoid radiation damage in the generation of thin films by means of cluster deposition, the cluster rays are used not, as has been customary, in ionised and electrically accelerated form, but as neutral rays for building up the films. Deflecting electromagnetic fields are used for suppressing unwanted ion incidence on the film.
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申请公布号 |
DE3611663(A1) |
申请公布日期 |
1987.10.08 |
申请号 |
DE19863611663 |
申请日期 |
1986.04.07 |
申请人 |
GSPANN,JUERGEN,DIPL.-PHYS.DR. |
发明人 |
GSPANN,JUERGEN,DIPL.-PHYS.DR. |
分类号 |
C23C14/22;(IPC1-7):C23C14/22 |
主分类号 |
C23C14/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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