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发明名称
MULTI-LAYER FILM
摘要
申请公布号
AU6751387(A)
申请公布日期
1987.07.16
申请号
AU19870067513
申请日期
1987.01.13
申请人
CANON K.K.
发明人
SHUNICHI ISHIHARA;MASAAKI HIROOKA;JUN-ICHI HANNA;ISAMU SHIMIZU
分类号
H01L31/04;C23C16/02;C23C16/452;H01L21/205
主分类号
H01L31/04
代理机构
代理人
主权项
地址
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