| 摘要 |
PURPOSE:To perform highly accurate measurement of the values of contact resistors by one measurement, by dividing a diffused layer between contact surfaces, and shorting the divided parts with a wiring layer, which has a very low resistance. CONSTITUTION:In measuring the values of contact resistances, at first, a current I4 is made to flow across current feeding terminals A-D, and a voltage V4 across voltage detecting terminals B-C is obtained. At this time, the voltage V4 indicates the voltage drop of a part comprising a series connection of two contact resistors at evaluating contact surfaces 2 and 2' and the resistances of an electrode and a wiring 3a. Since the electrode and the wiring layer indicates very low resistances, the values can be neglected. Therefore, the voltage drop can be regarded only for the values of the contact resistors. When each area of the evaluating contact surfaces 2 and 2' is S and equal, the specific contact resistance rho3 is computed by rho3=V4.S/2I4...(3).
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