| 摘要 |
PURPOSE:To compensate the control accuracy and response ability of pressure control valve by making each gas bubble in three pressure-resistant tanks in which their lower parts are connected each other in the upper stream of each reaction gas pressure control valve and a pressure container pressure holding valve. CONSTITUTION:Fluorine oils 11 is sealed in pressure control tanks 101, 102, 103 in which their lower parts are connected each other. Reaction gas exhaust pipes 12, 13 and an N2 gas outlet pipe 14 are introduced to a specified depth into the sealed liquid of the tanks. After bubbling, gasses are supplied to pressure control valves 4, 5 and a pressure holding valve 9 through each piping from the upper space of the tanks 101-103 and exhausted to the outside of a system. Thereby, differential pressure is instantaneously absorbed based on the Pascal's principle to compensate the control accuracy and response ability of the pressure control valve. |
