发明名称 Positive image-forming method using 4-methyl-1-pentene polymer
摘要 A positive image-forming material consisting of a methylpentene homopolymer or a methylpentene copolymer containing 50 mole percent or more of methylpentene units which has an intrinsic viscosity of not less than 0.2 dl/g as measured in decalin at 135 DEG C. and being soluble in not more than 100 times by weight of cyclohexene at 25 DEG C.
申请公布号 US4623610(A) 申请公布日期 1986.11.18
申请号 US19820353001 申请日期 1982.02.26
申请人 TOKYO SHIBAURA DENKI KABUSHIKI KAISHA;MITSUI PETROCHEMICAL INDUSTRIES, LTD. 发明人 YOSHIDA, HIROMI;MIYAMURA, MASATAKA;FUNAKOSHI, KATSUMI;NAGANO, RIICHIRO
分类号 G03H1/00;C08F10/00;C08F10/14;G03F7/039;G11B7/244;H01L21/027;(IPC1-7):G03C5/00 主分类号 G03H1/00
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