发明名称 WORK FEEDING METHOD
摘要 PURPOSE:To make pressing force in a collet feeding a work controllable, by installing a first magnetism generator, locked to the collet as a pressing force checking device, and a second magnetism generator set up in a work feeding part. CONSTITUTION:A collet 8 is brought down, attracting a pallet 6a by suction, and moved onto a base plate 1 where a bonding agent 5 is applied. And, the collet 8 is put down whereby the pallet 6a is pressed onto the bonding agent 5. A lower end of the collet 8 comes into contact with the bonding agent 5 of the base plate 1, and when an arm 9 is further brought down, there is produced a clearance l between a flange 8a and the top of the arm 9. Since this clearance l serves as a compression value of a spring 10, elastic force acts on the pallet 6a whereby its pressing force grows large. When this elastic force exceeds the preset value, the specified current flows into a first magnetism generator 13 from a driving part 17 so that repulsive force is produced between the first generator 13 and a second magnetism generator 14, making the collet 8 go up in relation to the arm 9.
申请公布号 JPS61131847(A) 申请公布日期 1986.06.19
申请号 JP19840254398 申请日期 1984.11.30
申请人 NEC KANSAI LTD 发明人 KAKEHI JIRO
分类号 B23Q7/04;H01L21/67;H01L21/677;H01L21/68 主分类号 B23Q7/04
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