发明名称 RADIOACTIVE RAYS FOCUSING APPARATUS
摘要 PURPOSE:To do focusing efficiently and to improve a filter function of the mirror, by forming the mirror shape for focusing radioactive rays as an inner shape of a revolving member which has a larger revolving radius as the distance from the radioactive ray source is larger toward a sample. CONSTITUTION:Synchrotron radiation light (SOR light) from a generating source diverges in a fan shape with an opening angle 2beta in a horizontal plane, but does not almost diverge in a vertical plane. A mirror 12 for focusing parallel the SOR light is shaped as a coniform inner shape which has a larger radius as the distance from the radioactive ray source 11 is larger toward a sample. A coniform apex angle 2alpha is selected so that viewing angles of outmost rays 13, 14 and central rays 15 of the SOR light to the mirror 12 become both theta. Thus variation of the viewing angle theta becomes very small over a wide range of incident positions of the SOR light to the mirror 12, and a focusing function of the mirror 12 and a filtering function can be improved.
申请公布号 JPS6191923(A) 申请公布日期 1986.05.10
申请号 JP19840212445 申请日期 1984.10.12
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 IDO SATOSHI;KITAYAMA TOYOKI;HAYASAKA TOA
分类号 G03F7/20;H01L21/027;H01L21/30 主分类号 G03F7/20
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