Structured resistive field shields for low-leakage high voltage devices

摘要

A segmented semi-insulating polysilicon (SIPOS) layer is used between conductors making contact to the surface of a silicon device in order to shield the surface from the effects of charge on dielectric layers above the surface so as to maintain breakdown voltages. The segmenting of the SIPOS layer significantly increases the resistance thereof and thereby limits leakage generated by the layer.