WAFER ELEVATING AND HOLDING DEVICE,申请号JP19850101647-传众专利搜索

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发明名称	WAFER ELEVATING AND HOLDING DEVICE
摘要
申请公布号	JPS60261150(A)	申请公布日期	1985.12.24
申请号	JP19850101647	申请日期	1985.05.15
申请人	VARIAN ASSOC	发明人	CHIYAARUZU BII GAARETSUTO
分类号	B65H29/46;B65G49/07;H01L21/67;H01L21/677;H01L21/687	主分类号	B65H29/46
代理机构		代理人
主权项
地址

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