| 摘要 |
PURPOSE:To obtain a thin film magnetic head that can be easily produced with high accuracy by forming a groove at a part of a magnetic substrate, putting a coil conductor into the groove for formation of a flat surface and forming a gap at the upper part of the coil conductor of an upper magnetic core set as if it covered the coil conductor. CONSTITUTION:A copper substance serving as a coil conductor is put into a groove 5a of a magnetic substrate 5 serving as a lower magnetic core. Then a lapping process is applied so as to obtain the substrate 5 having a flat surface including buried coil conductors 6 and 6'. A soft magnetic film is formed and then undergoes an ion etching process for formation of a magnetic core half 7a of upper magnetic cores 7 and 7'. Then this half 7a is shaped by a diamond cutting tool for formation of a gap surface 9. Then an SiO2 film 10 is formed by a sputtering process in the form of a head gap. A soft magnetic thin film is formed on the film 10. Then the soft magnetic thin film provided on the half 7a is removed by a lapping process. Thus a magnetic core half 7b is obtained. |
