| 摘要 |
PURPOSE:To ionize clusters efficiency and to vapordeposit an uniform thin film on a substrate by providing plural converging electrodes above a crucible for generating clusters so as to attract thermions toward a nozzle of the crucible for converging. CONSTITUTION:Thermions e<-> are attracted from filaments 9 and fly to a nozzle 4a of a crucible 4. In the vicinity of the nozzle 4a, a diameter of a cluster beam 17 is small and thermions are bombarded against the clusters with a high probability. As a result, ionization of the cluster is performed efficiently and uniformly. Accordingly, a thin film formed on a substrate 18 becomes uniform in its thickness and quality. |
