| 摘要 |
PURPOSE:To position a basket easily and positively by forming the shape of the basket having excellent strength by improving the structure of the basket while receiving a wafer by two projections formed to a necessary end wall. CONSTITUTION:A basket A manufactured by the monolithic molding of the whole fluoroplastics is used as a basket made of fluoroplastics which receives an silicon wafer in a semiconductor manufacturing industry and chemically treats it, but the reinforcing properties of both end walls 9, 15 in front and in rear are increased because projecting edges 10, 16 projecting to the outside in the vertical direction in edge sides both in both end walls 9, 15, and the basket A having excellent strength can be manufactured by the small usage of fluoroplastics. On top of that, when the basket A is positioned at the position of mounting to an automatic machine for treatment while downward directing the front end wall 9 under the state in which the wafer is received to the inside, the basket A can be fixed at a desired position when two stators 13, 14 at the same horizontal positions are inserted into recessed holes previously formed at the positions of fitting. |
